CDX Dual Frequency Power Supply

CDX Dual Frequency Power Supply

The CDX dual frequency RF generator comes in a 1200 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz (see new Dual High Frequency Power Supply on our website).

This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.