Comdel's VF series multi channel synthesizer modules provide phase adjustable output to avoid destructive arcing and cross-talk in multiple cathode plasma processing chambers. The VF series can accommodate up to 16 channels and may be programmed to any frequency between 2 and 60 MHz. Frequency...
The CXH series of hybrid, high frequency power supplies is designed to operate at a fixed frequency over the range of 2 to 40 MHz. The rugged amplifier design is well suited to demanding industrial applications where stability and reliability in the presence of erratic loads is required. The...
Comdel CV series power supplies offer stable VHF power at frequencies from 30 to 80 MHz. Configured within Comdel's standard control and monitoring package, the CV series offers exceptional ease of operation. RS-232 and analog controls are provided as standard; DeviceNet is optional....
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 2 to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on...
Every Match Pro system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between...
The CDX dual frequency RF generator comes in a 1200 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable...
RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency....
This user-friendly design contains parameter adjustments through variable controls, and is fully programmable to give the user maximum flexibility. Contained in a compact chassis weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation. The ESC-HV power...
Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight supplies come complete with NRTL product safety marks, built-in RF filters for device protection and unsurpassed clamping for...
Proven Reliability in Plasma Vacuum Systems Worldwide, the CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high...
Arc Detect Fast Shutdown
Comdel's Arc Detect Fast Shutdown option provides shutdown of the RF to minimize arc damage. It is an integrated system that works within the matching network and power supply. Latching fast shutdown located in the power supply interfaces with the arc detect circuit in the matching network. This...
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