ESC-HV Electrostatic Chuck Power Supply
Available from Comdel Inc.
This user-friendly design contains parameter adjustments through variable controls, and is fully programmable to give the user maximum flexibility. Contained in a compact chassis weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation.
The ESC-HV power supply provides reliable handling in large surface processes.
The ESC-HV features low stored energy and built-in current limitations to safeguard from surges and arcs, short circuit and open circuit proof design for enhanced reliability, no special requirements needed for cooling and shielding,and has parameter adjustments through variable controls and is fully programmable to give the user maximum flexibility.