Proven Reliability in Plasma Vacuum Systems Worldwide, the CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
The CX series extends to high-power ranges of 5000 and 10,000 Watts. In addition, the CXV600S Virtual-Quad series RF Generator is the ideal solution for applications requiring RF power to be delivered into one of four different locations.
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